The HR Series motors are high precision ceramic motors available in configurations with 2, 4 and 8 elements, designed and manufactured by Nanomotion. The HR Series combine unlimited travel range with high resolution and compact dimensions. The HR Series motors are available in standard, non-magnetic, vacuum, and UHV configurations.
• Linear and rotary applications
• Unlimited travel
• Wide dynamic velocity range: 1 µm/s to 250 mm/s
• Dynamic stall force: up to 32N
• Minimum increment: <10 nm
• HV and UHV versions available
• Zero backlash and holds position at power off
• Silent operation
• Non-magnetic and negligible EMI
OVERVIEW OF THE HR MOTORS
The HR series of motors are high precision ceramic motors. The HR motors combine unlimited stroke with high position resolution, in compact dimensions. The motors are used in applications such as microscopy, precision motion, robotics, etc.
The HR motors are available in versions that are compatible with vacuum and ultra-high vacuum operating environments. These applications include wafer inspection and metrology, scanning stages and lithography.
When working with a Nanomotion AB05 Driver the motors provide a linear response to the input voltage. The operation of the motor and Driver resembles that of a DC-motor driven by a voltage amplifier.
HR MOTOR SYSTEM
An HR motor is part of a motion system consisting of the following parts:
HR Motor
Ceramic
Driver
Optional encoder to provide position feedback
Motor and Controller/Driver
HR1 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR1
HR2 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR2
HR4 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR4
HR8 – AB1A, AB1A-3U, AB02, AB4, AB5/51, XCD-HR8, XCD-HR16
Performance Specifications
Specification | HR1 | HR2 | HR4 | HR8 |
Maximum Allowable Velocity | 250 mm/sec | 250 mm/sec | 250 mm/sec | 250 mm/sec |
Dynamic Stall Force | 3.5 to 4.5 N | 7 to 9 N | 15-18 N | 30-36 N |
Static Holding Force Reference value | 3.5 N | 7 N | 14 N | 28 N |
Non-Energised Stiffness | 0.8 – 1 | 1.4 – 8 | 2.3 – 2.8 | 3.3-3.8 |
Nominal Preload on | 18 N | 36 N | 72 N | 144 N |
Kf – Driver and command dependent | 0.5 – 1 | 1 – 2 | 2 – 4 | 4 |
Kfv | 12 to18 | 24 – 36 | 60-72 | 120-144 |
Offset | 1 – 2 V – Driver dependent | |||
Nominal Lifetime | 20,000 hours under nominal operating conditions | |||
Maximal Voltage | 280 Vrms | 280 Vrms | 270 Vrms | 270 Vrms |
Typical motor current at | 120 | 250 | 320 | 600 |
Maximum Power Con-sumption | 5 W | 10 W | 20 W | 40 W |
Length: | 40.5 mm | 40.5 mm | 42 mm | 41.9 mm |
Width: | 25.7 mm | 25.7 mm | 46.6 mm | 46.6 mm |
Height: | 8 mm | 12.7 mm | 15 mm | 23.8 mm |
Weight – standard motor | 20g | 40g | 73g | 120g |
Weight – high & ultra-high vacuum motors | 30g | 30g | 60g | 170g |
Ambient Temperature: | 0 – 50º C | |||
Storage: | -40 to +70º C | |||
Humidity: | 0 – 80% non-condensing | |||
Vacuum level for high-vacuum motors | 1e-7 torr (guaranteed only after baking) | |||
Vacuum level for ultra-high-vacuum motors | 1e-10 torr (guaranteed only after baking) | |||
Maximum Baking Temperature for vacuum motors | 120º C for standard motors | |||
Drive Strips, Rings, and Disks
Nanomotion supplies ceramic drive strips, rings, and CCS Ceramic Coated Steel for all our motor types. Standard strips, rings and disks are available in a wide variety of sizes and shapes. Nanomotion can also provide custom drive strips/rings for different application requirements. The mating drive surface is critical to the motor’s performance. All specifications are based on using Nanomotion’s drive surfaces. Most of Nanomotion’s standard drive strips are provided with vacuum compatible, double sided tape for easy mounting. The motor user manual defines the proper mounting procedure.
Standard Ceramic Strips:
CCS (Ceramic Coated Steel)
CR (Ceramic Rings)
Available length:
| Length | 100 mm, 150 mm, 200 mm, 250 mm, 300 mm, 350 mm, 400 mm, 450 mm, 50 mm, 500 mm |
|---|
Thanks for getting in touch!
Our team will respond as soon as possible.
Product Enquiry
Please complete all fields
