The SE series of motors are high precision ceramic motors. The SE motors combine unlimited stroke with high position resolution, in compact dimensions. The motors are used in applications such as microscopy, precision motion, robotics, etc.
The SE motors are available in versions that are compatible with ambient air, vacuum and ultra-high vacuum operating environments. These applications include wafer inspection and metrology, scanning stages and lithography.
When working with a Nanomotion AB7 Driver in Linear mode the motors provides a linear response to the input voltage.
The SE motor family optimises velocity and duty cycle with a new piezo element and motor structure. The SE motor family supports velocities ranging up to 500mm/sec, providing 3X the stiffness of the HR motor and double the efficiency. The increase in motor stiffness yields the ability to work in the sub-nanometer domain and higher efficiency supports significantly greater duty cycle particularly in vacuum operation.
The SE motor is available in standard (-S), vacuum/UHV (-V), and vacuum/non-magnetic (-VN) configurations.
The SE motor is currently available in the SE4 and SE8 sizes, yielding 16N and 32N force, respectively. The SE motor family is supported with both the AB7 driver (up to 4 x SE8 motors maximum) and Nanomotion’s XCD drive/control boards.
Drive Strips, Rings, and Disks
Nanomotion supplies ceramic drive strips, rings, and CCS Ceramic Coated Steel for all our motor types. Standard strips, rings and disks are available in a wide variety of sizes and shapes. Nanomotion can also provide custom drive strips/rings for different application requirements. The mating drive surface is critical to the motor’s performance. All specifications are based on using Nanomotion’s drive surfaces. Most of Nanomotion’s standard drive strips are provided with vacuum compatible, double sided tape for easy mounting. The motor user manual defines the proper mounting procedure.
Standard Ceramic Strips:
CCS (Ceramic Coated Steel)
CR (Ceramic Rings)
Available length:
| Length | 100 mm, 150 mm, 200 mm, 250 mm, 300 mm, 350 mm, 400 mm, 450 mm, 50 mm, 500 mm |
|---|
Thanks for getting in touch!
Our team will respond as soon as possible.
Product Enquiry
Please complete all fields