Shutter slit systems utilise a single piezo stack actuator to create symmetrical an open-close motion of two slit edges. The most common market for these systems is the photonics industry where they are used for beam shaping and collimation.
The piezo-electric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep, and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.
The PZS series shutter slit systems are available in UHV compatible version and with different body and slit edge materials (INVAR).
Some systems offer edges made from steel, or from invar. The optional measurement system uses a strain gauge sensor.
Common applications include: optics, spectroscopy, vacuum systems, optical switches, and shutters and scanners.
PZS series | unit | PZS 1 | PZS 2 | PZS 3 | PZS 4 |
Part No. | – | O-101-00 | O-102-00 | O-103-00 | O-101-80 |
Opening (± 10%)* | µm | 0 to 230 | 0 to 60 | 0 to 1500 | 0 to 300 |
Capacitance (± 20%) | µF | 1.8 | 0.7 | 7.2 | 2.5 |
Resolution** Open Loop | nm | 0.5 | 0.01 | 3 | 0.6 |
Resonant Frequency | Hz | 450 | 1400 | 200 | 500 |
Dimensions (L X W X H) | mm | 42 x 42 x 14 | 22 x 22 x 9.5 | 96 x 25 x 14 | 50 x 50 x 14 |
Aperture | mm | Ø8 | Ø4 | 9 x 4 | Ø10 |
Weight | g | 115 | 100 | 70 | 115 |
Vacuum Compatible Version | PZS 1 V | PZS 2 V | PZS 3 V | PZS 4 V | |
Part No. | – | O-101-02 | O-102-02 | O-103-02 | O-181-82 |
Series PZS With Integrated Measurement System | unit | PZS 1 SG | PZS 2 SG | – | PZS 4 SG |
Part No. | – | O-101-01 | O-102-01 | O-101-81 | |
Opening (± 0.2%) Closed Loop | µm | 190 | 50 | 240 | |
Integrated Measurement System | strain gage | strain gage | strain gage | ||
Resolution** Closed Loop | nm | 3 | 0.8 | 8 | |
Typ. Repeatability | nm | 15 | 6 | 20 | |
Weight | g | 130 | 115 | 130 |
Piezosystem Jena Shutter Slit Systems are highly versatile and find applications in various fields, including:
These systems are known for their nanometer resolution and symmetrical movement, making them ideal for high-precision tasks.
About 80 percent of Piezosystem Jena’s business is in supplying industry and OEM customers with custom or modified positioning solutions on a large scale. Almost all of these solutions are highly customised and built to each customer’s specific requirements. Even completely new systems are possible and can be designed, built and tested from the ground up.
Why should you choose Piezosystem Jena for an OEM solution?
• Detailed study of requirements and feasibility
• Close and discrete cooperation with customers
• Extensive consultation during all stages of the project
• State-of-the-Art design and customisation capabilities
• Standardised production processes
• Specific system calibration for best performance
• Cost-effective manufacturing with large scale product lines
• Over 25 years of experience in supplying industry customers
Industries we supply with OEM grade positioning solutions:
• Semiconductor
• Optics
• Energy
• 3D Printing
• Mechanical Engineering
• Among many others
For more information please feel free to contact us.
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